CDF100
- Manufacturer: Bruker
- Cantilever Coating: B: Reflective Aluminum
- Tip Geometry: Critical Dimension (Overhang)
-
Number of Cantilevers: 1個(gè)懸臂
F350KHz K35N/m L125um
AFM探針描述
適用的Sample:
Data Storage,Semiconductors
適用的AFM機(jī)型:
Insight
適用的Work Mode:
Critical Dimension (CD) AFM
適用的Application:
Holes/ Trenches
Coating 描述
cantilever Back side coating | Reflective Aluminum |
---|---|
tip coating | -- |
Tip 規(guī)格
tip geometry | Critical Dimension (Overhang) |
---|---|
tip radius (Nom) | -- |
tip height | 14-16um |
Front Angle (FA) | 10±2° |
Back Angle (BA) | 10 ±2° |
Side Angle (SA) | 10 ±2° |
Overhang | 5-15nm |
Effective Length | 250-350nm |
Tip Width | 80-100nm |
Vertical Edge Height | <10nm |
Cantilever 規(guī)格
cantilever geometry | Rectangular |
---|---|
K(Nom) | 35N/m |
Frequency(Nom) | 350KHz |
length(Nom) | 125um |
thickness(Nom) | 4um |
cantilever material | 0.01 - 0.02Ωcm Antimony (n) doped Si |
top layer back | 40 ±10 nm of Al |
最新產(chǎn)品
Frequency
Nom:
70KHz
Spring Const.
Nom:
2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
探針對(duì)比