EBD-CDR50
  • Manufacturer: Bruker
  • Cantilever Coating: B: Reflective Aluminum
  • Tip Geometry: Critical Dimension (Overhang)
  • Number of Cantilevers: 1個(gè)懸臂
    F300KHz K40N/m L125um
AFM探針描述

適用的Sample:
Semiconductors

適用的AFM機(jī)型:
Insight

適用的Work Mode:
Critical Dimension (CD) AFM,Deep Trench (DT)

適用的Application:
Holes/ Trenches

Coating 描述
cantilever Back side coating Reflective Aluminum
tip coating --
Tip 規(guī)格
tip geometry Critical Dimension (Overhang)
tip radius (Nom) 50nm
tip height 10-15um
Overhang 5-10nm
Effective Length 200-250nm
Vertical Edge Height <15nm
Cantilever 規(guī)格
cantilever geometry Rectangular
K(Nom) 40N/m
Frequency(Nom) 300KHz
length(Nom) 125um
thickness(Nom) 3.75um
cantilever material 0.01 - 0.025 Ωcm Antimony (n) doped Si
top layer back 40 ±10 nm of Al
最新產(chǎn)品
Frequency
Nom: 70KHz
Spring Const.
Nom: 2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom: 300KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom: 300KHz
Spring Const.
Nom: 42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom: 70KHz
Spring Const.
Nom: 2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
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