AFM探針描述
適用的Sample:
Other Hard Samples,Semiconductors
適用的AFM機(jī)型:
Insight
適用的Work Mode:
Deep Trench (DT),tapping or non-contact
適用的Application:
Holes/ Trenches
Coating 描述
| cantilever Back side coating | Reflective Aluminum |
|---|---|
| tip coating | -- |
Tip 規(guī)格
| tip geometry | High Aspect Ratio |
|---|---|
| tip radius (Nom) | 10nm |
| tip height | 10-15um |
| Front Angle (FA) | 1±0.5° |
| Back Angle (BA) | 1±0.5° |
| Side Angle (SA) | 1±0.5° |
| Tip Tilt compensation(°) | 3 |
| Spike Height | 5000nm |
| Spike Width | 100nm |
Cantilever 規(guī)格
| cantilever geometry | Rectangular |
|---|---|
| K(Nom) | 42N/m |
| Frequency(Nom) | 320KHz |
| length(Nom) | 125um |
| thickness(Nom) | 4um |
| cantilever material | 0.01 - 0.025 Ωcm Antimony (n) doped Si |
| top layer back | 45±5 nm of Al |
最新產(chǎn)品
Frequency
Nom:
70KHz
Spring Const.
Nom:
2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
